Evaporation Chamber: 1 multi pocket e-beam evaporator with two-metal thermal evaporation capability, gate valve (CF150 flange), view ports etc Port to be provided for upgrade with loadlock
BI01010001010000000000000515BI0100001113
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Nos
2
2
Sample holder capable of holding samples upto 4\" with rotation includes pneumatic/motorised, shutter, room temperature operation, and manual updown movement (by 25 mm) bellow sealed.
BI01010001010000000000000515BI0100001114
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Nos
3
3
Appropriate PID programmable water chiller for cooling ebeam, QCM etc along with water flow switch etc.
BI01010001010000000000000515BI0100001115
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Nos
4
4
Instrumentation rack
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Nos
5
5
Frame for mounting chamber
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Nos
6
6
Hipace700 (650lit/sec) turbo pumping system with edwards dry pump (10m3/hr) full range gauge
BI01010001010000000000000515BI0100001118
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Nos
7
7
221 (4 pocket 2cc) and ST4 power supply restricted to 3KW (due to small crucible) high voltage feedtroughs etc.
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