Scanning Electron Microscopes – Rasterelektronenmikroskop. For The Equipment Of The Clean Room For The Production Of Compact Quantum System, Devices For A Microtechnology Process Chain Are Obtained. To Control And Evaluate The Process Result On Substrates With A Diameter Of Up To 150 Mm, A High-Resolution Scan Electron Mik Roscope Is Provided. The Tender Only Includes The Specified System, The Media And Peripherals Required For This Are Provided Separately By The Dlr. Further Information Can Be Found In The Attached Service Description (Contract Documents).
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