Dry-Etching Equipment - Trocken tzcluster - Pr489013-2790-W. 1 Piece Dry Etching Cluster With Options: 4.4 Deposition Of Poly/ -Silicon And Teos Layers 5.1.4 Etching Of Other Metals (Such As Pt, Hf, W, Ge, Ni, Silicided Ni) Description, Which Other Metals Can Be Etched In The Present Configuration 6.4.7 Anisotropic Etching Of Sio2 And Si3n4
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